Thermoelectric properties of Si/SiC thin-film superlattices grown by ion beam sputtering
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Abstract
There are many mechanical systems that convert heat to work and processes that utilize heat including power plants, automobiles, and foundries. Most of these systems expel large amounts of waste heat to the environment that goes unused. One way of recovering the waste heat is to use a solid-state energy converter based on thermoelectric processes. Nano-scaled materials are of interest for use in thermoelectric devices because their properties enhance the efficiency over those obtained using bulk materials. Some nano-scaled materials systems being considered are thin-film superlattices that ...
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