Nano-imaging with compact extreme ultraviolet lasers

Kondratenko, V. V., author; Pershyn, Y. P., author; Artioukov, I. A., author; Vinogradov, A. V., author; Attwood, D. T., author; Anderson, E. H., author; Liddle, J. A., author; Chao, W., author; Rocca, Jorge J., author; Marconi, M. C., author; Menoni, C. S., author; Grisham, M., author; Brewer, C., author; Brizuela, F., author; Vaschenko, G., author; Optical Society of America, publisher

Nano-imaging with compact extreme ultraviolet lasers

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ECEjjr00152.pdf (156.18 KB)

Date

2005

Authors

Kondratenko, V. V., author

Pershyn, Y. P., author

Artioukov, I. A., author

Vinogradov, A. V., author

Attwood, D. T., author

Anderson, E. H., author

Liddle, J. A., author

Chao, W., author

Rocca, Jorge J., author

Marconi, M. C., author

Abstract

Recent advances in nanotechnology and nanoscience have created the need for new compact and practical imaging tools capable of resolving nanometer scale features. Although optical microscopy is unsurpassed in its versatility, the resolution of conventional optical microscopes is limited by the wavelength of the illuminating source to sizes that are typically larger than 200 nm.

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http://hdl.handle.net/10217/67821

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Nano-imaging with compact extreme ultraviolet lasers

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