Ablation of organic polymers by 46.9-nm-laser radiation
Date
2005
Authors
Rocca, Jorge J., author
Menoni, C. S., author
Vaschenko, G., author
Grisham, M. E., author
Wawro, A., author
Pelka, J. B., author
Krzywinski, J., author
Pientka, Z., author
Ullschmied, J., author
Präg, A. R., author
Journal Title
Journal ISSN
Volume Title
Abstract
We report results of the exposure of poly(tetrafluoroethylene) -(PTFE), poly(methyl methacrylate)-(PMMA), and polyimide -(PI) to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from ~0.1 to ~10 J/cm2. The ablation rates were found to be similar for all three materials, ~80-90 nm/pulse at 1 J/cm2. The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths.