Ablation of organic polymers by 46.9-nm-laser radiation

Rocca, Jorge J., author; Menoni, C. S., author; Vaschenko, G., author; Grisham, M. E., author; Wawro, A., author; Pelka, J. B., author; Krzywinski, J., author; Pientka, Z., author; Ullschmied, J., author; Präg, A. R., author; Otcenasek, Z., author; Krasa, J., author; Chvostova, D., author; Bittner, M., author; Juha, L., author; American Institute of Physics, publisher

Ablation of organic polymers by 46.9-nm-laser radiation

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ECEjjr00197.pdf (107.65 KB)

Date

2005

Authors

Rocca, Jorge J., author

Menoni, C. S., author

Vaschenko, G., author

Grisham, M. E., author

Wawro, A., author

Pelka, J. B., author

Krzywinski, J., author

Pientka, Z., author

Ullschmied, J., author

Präg, A. R., author

Abstract

We report results of the exposure of poly(tetrafluoroethylene) -(PTFE), poly(methyl methacrylate)-(PMMA), and polyimide -(PI) to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from ~0.1 to ~10 J/cm2. The ablation rates were found to be similar for all three materials, ~80-90 nm/pulse at 1 J/cm2. The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths.

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http://hdl.handle.net/10217/67848

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Ablation of organic polymers by 46.9-nm-laser radiation

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