Characterization of diffraction gratings by use of a tabletop soft-x-ray laser
Date
2001
Authors
Bach, Bernie, author
Bach, Benny, author
Depine, Ricardo A., author
Rocca, Jorge J., author
Seminario, Max, author
Optical Society of America, publisher
Journal Title
Journal ISSN
Volume Title
Abstract
We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop laser to characterize diffraction gratings designed for grazing-incidence operation in the soft-x-ray spectral region. The efficiencies for various diffraction orders were measured as a function of angle of incidence and compared with the results of model simulations. This measurement technique provides benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential of compact tabletop soft-x-ray lasers for use as a new tool for characterization of short-wavelength optics at the manufacturer's site.