Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Parkinson, B., author; Lu, Y., author; Rocca, Jorge J., author; Menoni, C. S., author; Marconi, M. C., author; Bartels, R. A., author; Wachulak, P. W., author; Optical Society of America, publisher

Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

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ECEjjr00076.pdf (619.59 KB)

Date

2006

Authors

Parkinson, B., author

Lu, Y., author

Rocca, Jorge J., author

Menoni, C. S., author

Marconi, M. C., author

Bartels, R. A., author

Wachulak, P. W., author

Optical Society of America, publisher

Abstract

We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.

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http://hdl.handle.net/10217/67595

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Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

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