Buried refractive microlenses formed by selective oxidation of AlGaAs
Date
1996
Authors
Warren, M. E., author
Hou, H. Q., author
Lear, Kevin L., author
Blum, O., author
IEE, publisher
Journal Title
Journal ISSN
Volume Title
Abstract
The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.
Description
Rights Access
Subject
oxidation
aluminium gallium arsenide