Nanoimaging with a compact extreme-ultraviolet laser
Date
2005
Authors
Kondratenko, V. V., author
Pershyn, Y. P., author
Artioukov, I. A., author
Vinogradov, A. V., author
Attwood, D. T., author
Anderson, E. H., author
Liddle, J. A., author
Chao, W., author
Rocca, Jorge J., author
Marconi, M. C., author
Journal Title
Journal ISSN
Volume Title
Abstract
Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a freestanding imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.