Nanoimaging with a compact extreme-ultraviolet laser

Kondratenko, V. V., author; Pershyn, Y. P., author; Artioukov, I. A., author; Vinogradov, A. V., author; Attwood, D. T., author; Anderson, E. H., author; Liddle, J. A., author; Chao, W., author; Rocca, Jorge J., author; Marconi, M. C., author; Menoni, C. S., author; Mancini, H., author; Grisham, M., author; Brewer, C., author; Brizuela, F., author; Vaschenko, G., author; Optical Society of America, publisher

Nanoimaging with a compact extreme-ultraviolet laser

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ECEjjr00182.pdf (124.77 KB)

Date

2005

Authors

Kondratenko, V. V., author

Pershyn, Y. P., author

Artioukov, I. A., author

Vinogradov, A. V., author

Attwood, D. T., author

Anderson, E. H., author

Liddle, J. A., author

Chao, W., author

Rocca, Jorge J., author

Marconi, M. C., author

Abstract

Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a freestanding imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

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http://hdl.handle.net/10217/67842

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Nanoimaging with a compact extreme-ultraviolet laser

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