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Dielectric characteristics of spin-coated dielectric films using on-wafer parallel-plate capacitors at microwave frequencies

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dc.contributor.authorAl-Omari, Ahmad N., author
dc.contributor.authorLear, Kevin L., author
dc.contributor.authorIEEE, publisher
dc.date.accessioned2007-01-03T04:42:37Z
dc.date.available2007-01-03T04:42:37Z
dc.date.issued2005
dc.description.abstractDielectric properties of spin-coated dielectric insulators suitable for high-speed device fabrication are investigated. Complex dielectric permittivities and tangential losses of two polyimides, bisbenzocyclobutene (BCB), and a spin-on-glass (SOG) were extracted from the measured microwave reflection coefficient, S11, of parallel-plate capacitors over a frequency range of 50 MHz to 40 GHz. A model for the dielectric permittivity as a function of frequency is developed based on measured data with a minimum square error of less than 10-4 between measured and modeled microwave reflection coefficients. A circuit model for the pad capacitance is obtained based on geometrical and physical considerations. The relationship between the dielectric loss and its thickness is considered. Experimental results are fitted to Debye and Cole-Cole models.
dc.description.sponsorshipThis work has been supported in part by the Defense Advanced Research Projects Agency under contract number DAAD19-03-1-0059 and by Yarmouk University in Irbid, Jordan.
dc.format.mediumborn digital
dc.format.mediumarticles
dc.identifier.bibliographicCitationAl-Omari, A. N. and K. L. Lear, Dielectric Characteristics of Spin-coated Dielectric Films Using On-wafer Parallel-plate Capacitors at Microwave Frequencies, IEEE Transactions on Dielectrics and Electrical Insulation 12, no. 6 (December 2005): 1151-1161.
dc.identifier.urihttp://hdl.handle.net/10217/822
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado State University. Libraries
dc.relation.ispartofFaculty Publications
dc.rights©2005 IEEE.
dc.rightsCopyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.
dc.subjectbisbenzcyclobutene (BCB)
dc.subjectspin-on glass (SOG)
dc.subjectpolyimide
dc.subjectdielectric permittivity
dc.subjectdielectric loss
dc.subjectDebye model
dc.subjectCole-Cole model
dc.subjecttangential loss
dc.subjectpolymer films
dc.subjectpad capacitance
dc.titleDielectric characteristics of spin-coated dielectric films using on-wafer parallel-plate capacitors at microwave frequencies
dc.typeText

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