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Spectroscopic ellipsometry as a process control tool for manufacturing cadmium telluride thin film photovoltaic devices

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dc.contributor.authorSmith, Westcott P., author
dc.contributor.authorKirkpatrick, Allan T., advisor
dc.contributor.authorJames, Susan, advisor
dc.contributor.authorPuttlitz, Christian, committee member
dc.contributor.authorSampath, W. S., committee member
dc.contributor.authorWu, Mingzhong, committee member
dc.date.accessioned2007-01-03T04:54:52Z
dc.date.available2007-01-03T04:54:52Z
dc.date.issued2013
dc.description.abstractIn recent decades, there has been concern regarding the sustainability of fossil fuels. One of the more promising alternatives is Cadmium Telluride (CdTe) thin–film photovoltaic (PV) devices. Improved quality measurement techniques may aid in improving this existing technology. Spectroscopic ellipsometry (SE) is a common, non-destructive technique for measuring thin films in the silicon wafer industry. SE results have also been tied to properties believed to play a role in CdTe PV device efficiency. A study assessing the potential of SE for use as a quality measurement tool had not been previously reported. Samples of CdTe devices produced by both laboratory and industrial scale processes were measured by SE and Scanning Electron Microscopy (SEM). Mathematical models of the optical characteristics of the devices were developed and fit to SE data from multiple angles and locations on each sample. Basic statistical analysis was performed on results from the automated fits to provide an initial evaluation of SE as a quantitative quality measurement process. In all cases studied, automated SE models produced average stack thickness values within 10% of the values produced by SEM, and standard deviations for the top bulk layer thickness were less than 1% of the average values.
dc.format.mediumborn digital
dc.format.mediumdoctoral dissertations
dc.identifierSmith_colostate_0053A_11711.pdf
dc.identifier.urihttp://hdl.handle.net/10217/78869
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado State University. Libraries
dc.relation.ispartof2000-2019
dc.rightsCopyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.
dc.subjectcadmium
dc.subjectellipsometry
dc.subjectquality
dc.subjectspectroscopic
dc.subjecttelluride
dc.subjecttellurium
dc.titleSpectroscopic ellipsometry as a process control tool for manufacturing cadmium telluride thin film photovoltaic devices
dc.typeText
dcterms.rights.dplaThis Item is protected by copyright and/or related rights (https://rightsstatements.org/vocab/InC/1.0/). You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).
thesis.degree.disciplineMechanical Engineering
thesis.degree.grantorColorado State University
thesis.degree.levelDoctoral
thesis.degree.nameDoctor of Philosophy (Ph.D.)

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