Nanometer-scale ablation with a table-top soft x-ray laser
Date
2006
Authors
Parkinson, B., author
Lu, Y., author
Anderson, E. H., author
Attwood, D. T., author
Chao, W., author
Bloom, S., author
Hemberg, O., author
Rocca, Jorge J., author
Menoni, C. S., author
Etxarri, A. Garcia, author
Journal Title
Journal ISSN
Volume Title
Abstract
Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.