Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium
Date
2005
Authors
Alessi, D., author
Berrill, M., author
Luther, B. M., author
Larotonda, M. A., author
Wang, Y., author
Rocca, Jorge J., author
Optical Society of America, publisher
Journal Title
Journal ISSN
Volume Title
Abstract
We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain-length product G×L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphirelaser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 mW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.