Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system
| dc.contributor.author | Li, Wei, author | |
| dc.contributor.author | Marconi, Mario C., advisor | |
| dc.contributor.author | Menoni, Carmen S., committee member | |
| dc.contributor.author | Wu, Mingzhong, committee member | |
| dc.date.accessioned | 2007-01-03T05:55:39Z | |
| dc.date.available | 2007-01-03T05:55:39Z | |
| dc.date.issued | 2013 | |
| dc.description.abstract | This thesis describes a novel technique of extreme ultraviolet (EUV) lithography. A compact nanofabrication system that combines Talbot lithography and a table top extreme ultraviolet laser illumination is presented. The lithographic method based on the Talbot effect provides a robust and simple experimental setup that is capable to print arbitrary periodic structures over millimeter square areas free of defects. Test structures were printed and metalized by ion beam etching system which was rebuilt and calibrated as part of this work. The results demonstrate that a complete coherent extreme ultraviolet lithographic process based on a table top system has the capability to fabricate functional periodic metallic nanostructures. Preliminary results and prospects for future work are also presented at the end of this thesis. | |
| dc.format.medium | born digital | |
| dc.format.medium | masters theses | |
| dc.identifier | Li_colostate_0053N_11891.pdf | |
| dc.identifier.uri | http://hdl.handle.net/10217/80262 | |
| dc.language | English | |
| dc.language.iso | eng | |
| dc.publisher | Colorado State University. Libraries | |
| dc.relation.ispartof | 2000-2019 | |
| dc.rights | Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright. | |
| dc.subject | extreme ultraviolet | |
| dc.subject | ion beam etching | |
| dc.subject | nanofabrication | |
| dc.subject | periodic nanostructures | |
| dc.subject | table-top system | |
| dc.subject | Talbot | |
| dc.title | Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system | |
| dc.type | Text | |
| dcterms.rights.dpla | This Item is protected by copyright and/or related rights (https://rightsstatements.org/vocab/InC/1.0/). You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s). | |
| thesis.degree.discipline | Electrical and Computer Engineering | |
| thesis.degree.grantor | Colorado State University | |
| thesis.degree.level | Masters | |
| thesis.degree.name | Master of Science (M.S.) |
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