Polyimide-planarized, vertical-cavity surface emitting lasers with 17.0 GHz bandwith
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Authors
Al-Omari, Ahmad N., author
Lear, Kevin L., author
IEEE, publisher
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Abstract
High speed, oxide-confined, polyimide-planarized 850 nm vertical cavity surface emitting lasers (VCSELs) exhibit - 3dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semi-insulating substrates to achieve low capacitance.
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Subject
optical polymers
p-n heterojunctions
optical modulation
adhesion
high-speed optical techniques
semiconductor device testing
semiconductor lasers
laser cavity resonators
optical fabrication
surface emitting lasers