Nanometer-scale machining with extreme ultraviolet lasers
This thesis demonstrates the feasibility of direct machining in the nanometer scale using Extreme Ultraviolet (EUV) laser radiation. Laser machining of materials has been widely used for the development of micromechanical components and devices. Advances in technology further motivate the extension of laser machining of microstructures to smaller dimensions. The advent of high repetition rate table top EUV lasers has opened the possibility of extending laser machining to the nanometer-scale. It has been previously demonstrated that single laser shots from a 46.9 nm wavelength capillary discharge ...
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