Nanoimaging with a compact extreme-ultraviolet laser

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http://hdl.handle.net/10217/67842
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Abstract
Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a freestanding imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.
Author(s)
Kondratenko, V. V.; Pershyn, Y. P.; Artioukov, I. A.; Vinogradov, A. V.; Attwood, D. T.; Anderson, E. H.; Liddle, J. A.; Chao, W.; Rocca, Jorge J.; Marconi, M. C.; Menoni, C. S.; Mancini, H.; Grisham, M.; Brewer, C.; Brizuela, F.; Vaschenko, G.

Date Issued
2005
Format
born digital; articles
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