Nanoimaging with a compact extreme-ultraviolet laser

Kondratenko, V. V.; Pershyn, Y. P.; Artioukov, I. A.; Vinogradov, A. V.; Attwood, D. T.; Anderson, E. H.; Liddle, J. A.; Chao, W.; Rocca, Jorge J.; Marconi, M. C.; Menoni, C. S.; Mancini, H.; Grisham, M.; Brewer, C.; Brizuela, F.; Vaschenko, G.

Abstract

Images with a spatial resolution of 120–150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc–Si multilayer-coated Schwarzschild condenser and a freestanding imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

Contributor

Kondratenko, V. V.; Pershyn, Y. P.; Artioukov, I. A.; Vinogradov, A. V.; Attwood, D. T.; Anderson, E. H.; Liddle, J. A.; Chao, W.; Rocca, Jorge J.; Marconi, M. C.; Menoni, C. S.; Mancini, H.; Grisham, M.; Brewer, C.; Brizuela, F.; Vaschenko, G.

Date

2005

Collections

Faculty Publications - Electrical and Computer Engineering