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    • Faculty Publications - Department of Electrical and Computer Engineering
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    Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

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    http://hdl.handle.net/10217/67595
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    Abstract
    We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.
    Author(s)
    Parkinson, B.; Lu, Y.; Rocca, Jorge J.; Menoni, C. S.; Marconi, M. C.; Bartels, R. A.; Wachulak, P. W.

    Date Issued
    2006
    Format
    born digital; articles
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    • Faculty Publications - Department of Electrical and Computer Engineering

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