Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light
Date
2006
Authors
Attwood, D. T., author
Liu, Y., author
Liddle, J. A., author
Harteneck, B. D., author
Chao, W., author
Anderson, E. H., author
Menoni, C. S., author
Rocca, Jorge J., author
Marconi, M. C., author
Luther, B. M., author
Journal Title
Journal ISSN
Volume Title
Abstract
We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.