Glow-discharge-created electron beams: cathode materials, electron gun designs, and technological applications
The operating characteristics of glow-discharge-created electron beams are discussed. Ten different cathode materials are compared with regard to maximum electron beam current achieved and the beam generation efficiency as measured calorimetrically. Specific electron gun designs are presented for a variety of applications that include: cw ion laser excitation; electron beam assisted chemical vapor deposition of microelectronic films; and wide area annealing of ion implantation damage to silicon substrates. The use of sintered metal-ceramic (e.g., Mo-Al2O3) cathodes to generate multikilowatt ...
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