Total and differential sputter yields of boron nitride
A quartz crystal microbalance (QCM) based system was used to measure total and differential sputter yields of Boron Nitride targets due to Xenon ion bombardment. The system used a four-grid ion source to generate a (nearly) mono-energetic beam of ions with a low singles-to-doubles ratio that remains well-collimated at low energies. Boron Nitride sputter yields were measured as a function of Xenon ion energy and incidence angle. Total yield measurements are found by integrating differential yield data taken by the QCM. The measurement system was validated by sputtering Molybdenum, for which the ...
(For more, see "View full record.")