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Statistics for A study of the influence of process parameter variations on the material properties and laser damage performance of ion beam sputtered Sc2O3 and HfO2 thin films

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A study of the influence of process parameter variations on the material properties and laser damage performance of ion beam sputtered Sc2O3 and HfO2 thin films 3

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Langston_colostate_0053A_13918.pdf 134