Attwood, D. T., authorLiu, Y., authorLiddle, J. A., authorHarteneck, B. D., authorChao, W., authorAnderson, E. H., authorMenoni, C. S., authorRocca, Jorge J., authorMarconi, M. C., authorLuther, B. M., authorLarotonda, M. A., authorWang, Y., authorBrizuela, F., authorBrewer, C., authorVaschenko, G., authorOptical Society of America, publisher2007-01-032007-01-032006Vaschenko, G., et al., Sub-38 nm Resolution Tabletop Microscopy with 13 nm Wavelength Laser Light, Optics Letters 31, no. 9 (May 1, 2006): 1214-1216.http://hdl.handle.net/10217/67522We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.born digitalarticleseng©2006 Optical Society of America.Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.Text