Warren, M. E., authorHou, H. Q., authorLear, Kevin L., authorBlum, O., authorIEE, publisher2007-01-032007-01-031996Blum, O., et al., Buried Refractive Microlenses Formed by Selective Oxidation of AlGaAs, Electronics Letters 32, no. 15 (18 July 1996): 1406-1408.http://hdl.handle.net/10217/67865The authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.born digitalarticleseng©1996 IEE.Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.oxidationaluminium gallium arsenideText