Parkinson, B., authorLu, Y., authorAnderson, E. H., authorAttwood, D. T., authorChao, W., authorBloom, S., authorHemberg, O., authorRocca, Jorge J., authorMenoni, C. S., authorEtxarri, A. Garcia, authorVaschenko, G., authorOptical Society of America, publisher2007-01-032007-01-032006Vaschenko, G., et al., Nanometer-Scale Ablation with a Table-Top Soft X-Ray Laser, Optics Letters 31, no. 24 (December 15, 2006): 3615-3617.http://hdl.handle.net/10217/67609Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.born digitalarticleseng©2006 Optical Society of America.Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.Text