Rocca, Jorge J., authorMenoni, C. S., authorMarconi, M. C., authorCapeluto, M. G., authorWachulak, P. W., authorOptical Society of America, publisher2007-01-032007-01-032007Capeluto, M. G., et al., Scanning Mechanism Based on a Programmable Liquid Crystal Display, Optics Express 15, no. 6 (March 19, 2007): 3465-3469.http://hdl.handle.net/10217/67583Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact tabletop set up.born digitalarticleseng©2007 Optical Society of America.Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithographyText