Kondratenko, V. V., authorPershyn, Y. P., authorArtioukov, I. A., authorVinogradov, A. V., authorAttwood, D. T., authorAnderson, E. H., authorLiddle, J. A., authorChao, W., authorRocca, Jorge, J., authorMarconi, M. C., authorMenoni, C. S., authorGrisham, M., authorBrewer, C., authorVaschenko, G., authorBrizuela, F., authorOptical Society of America, publisher2007-01-032007-01-032005Brizuela, F., et al., Reflection Mode Imaging with Nanoscale Resolution Using a Compact Extreme Ultraviolet Laser, Optics Express 13, no. 11 (30 May 2005): 3983-3988.http://hdl.handle.net/10217/67839We report the demonstration of reflection mode imaging of 100 nm-scale features using 46.9 nm light from a compact capillary-discharge laser. Our imaging system employs a Sc/Si multilayer coated Schwarzschild condenser and a freestanding zone plate objective. The reported results advance the development of practical and readily available surface and nanostructure imaging tools based on the use of compact sources of extreme ultraviolet light.born digitalarticleseng©2005 Optical Society of America.Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.Text