Investigation on improvements of TCO processing on CdTe thin film solar cells
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Abstract
Cadmium Stannate (Cd2 SnO4) is a high performance TCO (transparent conducting oxide) that has been used in the fabrication of leading performance thin film CdTe solar cells. Several studies in this work were done to enhance the technical knowledgebase and industry processing of the Cd2 SnO4: mechanical film properties, tantalum doping, pulsed-DC compared to RF plasma deposition, and modeling of the sputter system in Fluent and Comsol. Mechanical properties, determined from nanoindentation measurements, are valuable for flexible substrate design and topcoats. It was found films annealed in oxygen ...
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