Development of chemical solution deposited lead zirconate titanate ferroelectric thin films for non-planar substrates
This thesis focuses on the development of a technique to deposit chemical solution de- rived thin films of the ferroelectric material lead zirconate titanate (PZT) onto non-planar substrates. PZT is a widely researched ferroelectric material for many thin film applications due to the magnitude of its dielectric, ferroelectric and piezoelectric properties. Chemical solution deposition (CSD) is a low cost, low capital method of depositing thin films which also allows for intimate mixing of precursors, leading to homogeneous final films. Applying CSD methods to non-planar substrates would allow for ...
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