MOD BST based resonator and filters
Tunable and switchable BST FBAR with different composition (BST6040 doped and undoped, BST7030, BST8020 and BST9010) are designed, simulated and fabricated on silicon and sapphire substrates. BST with different composition has shown great promise for microwave applications as the BAW resonators. Tunable and switchable BST7030 FBAR band stop filters are designed, simulated and fabricated on silicon and sapphire substrates with different thickness. FBAR resonator and filter were implemented using six layers of tantalum oxide and silicon dioxide on high resistivity Sapphire and Silicon substrates ...
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