Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

Alessi, D., author; Berrill, M., author; Luther, B. M., author; Larotonda, M. A., author; Wang, Y., author; Rocca, Jorge J., author; Optical Society of America, publisher

Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

Files

ECEjjr00175.pdf (119.07 KB)

Date

2005

Authors

Alessi, D., author

Berrill, M., author

Luther, B. M., author

Larotonda, M. A., author

Wang, Y., author

Rocca, Jorge J., author

Optical Society of America, publisher

Abstract

We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain-length product G×L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphirelaser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 mW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.

URI

http://hdl.handle.net/10217/67835

Collections

Faculty Publications

Full item page

Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium

Files

Date

Authors

Journal Title

Journal ISSN

Volume Title

Abstract

Description

Rights Access

Subject

Citation

URI

Associated Publications

Collections