Stabilization of a cold cathode electron beam glow discharge for surface treatment
Date
1997
Authors
Mingolo, N., author
Martínez, O. E., author
González, C. R., author
Rocca, Jorge J., author
American Institute of Physics, publisher
Journal Title
Journal ISSN
Volume Title
Abstract
We have demonstrated that the reproducibility of electron beam pulses generated by a high power, cold cathode glow discharge is greatly improved by adding a small continuous keep-alive discharge current. A current of the order of 200 μA was found to limit the shot to shot current variation to within 1.5%. This stabilization in turn reduces by an order of magnitude the fluctuations of the energy density deposited on the target, demonstrating a reliable energy source for surface treatment.