Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

Attwood, D. T., author; Liu, Y., author; Liddle, J. A., author; Harteneck, B. D., author; Chao, W., author; Anderson, E. H., author; Menoni, C. S., author; Rocca, Jorge J., author; Marconi, M. C., author; Luther, B. M., author; Larotonda, M. A., author; Wang, Y., author; Brizuela, F., author; Brewer, C., author; Vaschenko, G., author; Optical Society of America, publisher

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

Date

2006

Authors

Attwood, D. T., author

Liu, Y., author

Liddle, J. A., author

Harteneck, B. D., author

Chao, W., author

Anderson, E. H., author

Menoni, C. S., author

Rocca, Jorge J., author

Marconi, M. C., author

Luther, B. M., author

Abstract

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.

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http://hdl.handle.net/10217/67522

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Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

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