Browsing by Author "Wachulak, P. W."
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Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
Author(s):Rocca, Jorge J.; Menoni, C. S.; Marconi, M. C.; Capeluto, M. G.; Wachulak, P. W.Date Issued:2007Format:born digital; articlesArrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This ... -
Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser
Author(s):Parkinson, B.; Lu, Y.; Rocca, Jorge J.; Menoni, C. S.; Marconi, M. C.; Bartels, R. A.; Wachulak, P. W.Date Issued:2006Format:born digital; articlesWe report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic ... -
Volume extreme ultraviolet holographic imaging with numerical optical sectioning
Author(s):Rocca, J. J.; Menoni, C. S.; Bartels, R. A.; Marconi, Mario Carlo; Wachulak, P. W.Date Issued:2007Format:born digital; articlesThree dimensional images were obtained using a single high numerical aperture hologram recorded in a high resolution photoresist with a table top λ = 46.9 nm laser. Gabor holograms were numerically reconstructed over a ...